Manufacturing process for ultimate performance inertial MEMS Accelerometer

In the context of the Modular Advanced Inertial System Development, the introduction of Silicon Very High Performances MEMS Accelerometers Technology is targeted. Based on an existing design, the challenge of the topic is to develop an industrial Silicon MEMS manufacturing process to meet the performances, reliability and reproducibility level required by inertial systems applications.
Re issuance from CfPW03.

Please refer to the full and formal topic descriptions published in this call.