Graphene for Semiconductor Industry

Projektinformationen

G4SEMI

ID Finanzhilfevereinbarung: 811715

DOI

10.3030/811715

Projekt abgeschlossen

EK-Unterschriftsdatum 13 April 2018

Startdatum 1 Mai 2018

Enddatum 30 April 2020

Finanziert unter

• INDUSTRIAL LEADERSHIP - Innovation In SMEs

Gesamtkosten

€ 1 961 125,00

EU-Beitrag

€ 1 372 787,50

Koordiniert durch

GRAPHENEA SEMICONDUCTOR SL
Spain

Periodic Reporting for period 2 - G4SEMI (Graphene for Semiconductor Industry)

Berichtszeitraum: 2019-05-01 bis 2020-04-30

Zusammenfassung vom Kontext und den Gesamtzielen des Projekts

G4SEMI project aims to introduce Graphene-on-wafers into semiconductor fabrication plants (fabs) and develop the potential of graphene for advanced electronic systems by means of combining large scale graphene synthesis (200mm wafers) and conventional CMOS (Complementary Metal Oxide Semiconductor) technology in order to integrate graphene into existing manufacturing processes.

Arbeit, die ab Beginn des Projekts bis zum Ende des durch den Bericht erfassten Berichtszeitraums geleistet wurde, und die wichtigsten bis dahin erzielten Ergebnisse

A 200mm CVD pilot plant has been successfully installed at Grapheneás facilities for the scale up of graphene growth on Cu catalyst.
The investigation of catalyst treatments, and the adjustment of growth parameters as well as some hardware design revisions, have allowed Graphenea to achieve 200mm scale graphene growth. It has been demonstrated that it is possible to achieve large area graphene on catalyst and on wafer.
Under the framework of a custom-made graphene integration scenario a modified transfer method has been defined. Graphene is successfully transferred to semiconductor substrates at 200mm scale. Polymeric and metal contaminants are critical to achieve graphene on wafer under the defined specifications.
A quality control protocol has been defined to ensure a batch to batch reproducibility of a standard graphene-on-wafer product.
During this first year we have established a dissemination plan to reach those audiences that can be interested in our scale up capacity and can work in collaboration with us to develop new CVD graphene on wafer applications. We have attended trade shows and conferences, and we have arranged face to face meetings with customers, to show our development to potential customers.

Fortschritte, die über den aktuellen Stand der Technik hinausgehen und voraussichtliche potenzielle Auswirkungen (einschließlich der bis dato erzielten sozioökonomischen Auswirkungen und weiter gefassten gesellschaftlichen Auswirkungen des Projekts)

It is the first time that a pilot line to produce graphene on 200mm scale has been established.
This will enable the introduction of graphene in industrial applications where the minimum scale is 200mm size.

Graphene transferred on to 200mm wafer