Publications Other (1) The BCR sub-micrometre photomask linewidth standard CRM 676 Author(s): NUNN J (National Physics Laboratory, Teddington (GB)), MIRANDE W (Physicalisch-Technische Bundesanstalt, Braunchweig (DE)), TALENE N (Du Pont Photomasks, Rousset (FR)), SALIERI P (CEC Bruxelles (BE)) Published in: EUR 18201 EN (1998) 54pp., free of charge, 1998, Page(s) 54, ISBN 92-828-3078-0 Searching for OpenAIRE data... There was an error trying to search data from OpenAIRE No results available
