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Development of innovative ALD materials and tools for high density 3D integrated capacitors

Project Information

PICS

Grant agreement ID: 606149

Project website

Project closed

Start date 1 September 2013

End date 31 August 2015

Funded under

Specific Programme "Capacities": Research for the benefit of SMEs

Total cost

€ 1 423 457,00

EU contribution

€ 1 067 000,00

1 067 000,00

356 457,00

Coordinated by

MURATA INTEGRATED PASSIVE SOLUTIONS
France

News

Archived New products and technologies

Nanotech tools open market for more miniature electronics

27 October 2015

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Last update: 8 July 2016

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Permalink: https://cordis.europa.eu/project/id/606149/news

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