Obiettivo The objective of the project is to produce a photomask linewidth calibration standard covering the dimensional range 0.20 um up to 50 um, with a 95% confidence level uncertainty in the calibration of lines of at least +/- 0.02 um in the 0.2 um up to 10 um range, and of at least +/- 0.05 um in the 10 um to 50 um range. The standard, to be fabricated in high density chromium (optical density greater than 2.5 at 450 nm) on a fused quartz plate coated with a conducting layer, is to be suitable for use in both optical and electron beam systems. Initially, ten artefacts will be manufactured, three of these being calibrated and retained by the Commission, the National Physical Laboratory (NPL) and the Physikalisch-Technische Bundesanstalt (PTB). Status: The work is in progress. Campo scientifico natural scienceschemical sciencesinorganic chemistrytransition metals Programma(i) FP2-BCR 4 - Research and development programme (EEC) in the field of applied metrology and chemical analysis (Community Bureau of Reference - BCR), 1988-1992 Argomento(i) Data not available Invito a presentare proposte Data not available Meccanismo di finanziamento CSC - Cost-sharing contracts Coordinatore National Physical Laboratory (NPL) Contributo UE Nessun dato Indirizzo Queen's Road TW11 0LW Teddington Regno Unito Mostra sulla mappa Costo totale Nessun dato Partecipanti (4) Classifica in ordine alfabetico Classifica per Contributo UE Espandi tutto Riduci tutto Dupont Photomask SA Francia Contributo UE Nessun dato Indirizzo Rue Olivier Perroy 13790 Rousset Mostra sulla mappa Costo totale Nessun dato National Microelectronics Research Center Irlanda Contributo UE Nessun dato Indirizzo Mostra sulla mappa Costo totale Nessun dato PHYSIKALISCH-TECHNISCHE BUNDESANSTALT Germania Contributo UE Nessun dato Indirizzo Bundesallee 100 BRAUNSCHWEIG Mostra sulla mappa Collegamenti Sito web Opens in new window Costo totale Nessun dato Rutherford Appleton Laboratory (RAL) Regno Unito Contributo UE Nessun dato Indirizzo Chilton OX11 0QX Didcot Mostra sulla mappa Costo totale Nessun dato
