Development of a photomask linewidth standard

Informations projet

N° de convention de subvention: MTR176

Date de début

Date de fin

Financé au titre de

• Research and development programme (EEC) in the field of applied metrology and chemical analysis (Community Bureau of Reference - BCR), 1988-1992

Coût total € 0,00

Contribution de l’UE € 1 241 873,00

Coordonné par

National Physical Laboratory (NPL)
United Kingdom

Objectif

The objective of the project is to produce a photomask linewidth calibration standard covering the dimensional range 0.20 um up to 50 um, with a 95% confidence level uncertainty in the calibration of lines of at least +/- 0.02 um in the 0.2 um up to 10 um range, and of at least +/- 0.05 um in the 10 um to 50 um range. The standard, to be fabricated in high density chromium (optical density greater than 2.5 at 450 nm) on a fused quartz plate coated with a conducting layer, is to be suitable for use in both optical and electron beam systems. Initially, ten artefacts will be manufactured, three of these being calibrated and retained by the Commission, the National Physical Laboratory (NPL) and the Physikalisch-Technische Bundesanstalt (PTB).

Status:
The work is in progress.

Champ scientifique

• natural sciences › chemical sciences › inorganic chemistry › transition metals

Programme(s)

• FP2-BCR 4 - Research and development programme (EEC) in the field of applied metrology and chemical analysis (Community Bureau of Reference - BCR), 1988-1992

Thème(s)

Data not available

Appel à propositions

Data not available

Régime de financement

CSC - Cost-sharing contracts

Coordinateur

National Physical Laboratory (NPL)

• Contribution de l’UE: Aucune donnée
• Adresse: Queen's Road ; TW11 0LW Teddington ; Royaume-Uni
• Coût total: Aucune donnée

Participants (4)

Dupont Photomask SA

France

• Contribution de l’UE: Aucune donnée
• Adresse: Rue Olivier Perroy ; 13790 Rousset
• Coût total: Aucune donnée

National Microelectronics Research Center

Irlande

• Contribution de l’UE: Aucune donnée
• Coût total: Aucune donnée

PHYSIKALISCH-TECHNISCHE BUNDESANSTALT

Allemagne

• Contribution de l’UE: Aucune donnée
• Adresse: Bundesallee 100 ; BRAUNSCHWEIG
• Coût total: Aucune donnée

Rutherford Appleton Laboratory (RAL)

Royaume-Uni

• Contribution de l’UE: Aucune donnée
• Adresse: Chilton ; OX11 0QX Didcot
• Coût total: Aucune donnée