Metrology for future 3D-technologies

Project Information

METRO4-3D

Grant agreement ID: 688225

DOI 10.3030/688225

Project closed

EC signature date 25 November 2015

Start date 1 February 2016

End date 31 January 2019

Funded under

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Total cost € 3 349 813,75

EU contribution € 2 689 035,00

Coordinated by

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

Deliverables

Documents, reports (5)

Report on organized training on the instrument
Report on dissemination activities
Summary of the access time on the instruments
Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Websites, patent fillings, videos etc. (1)

Set-up of the website and strategic board

Publications

Peer reviewed articles (1)

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Author(s): Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Published in: Microscopy and Microanalysis, Issue 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Publisher: Cambridge University Press
DOI: 10.1017/S1431927617007991